Diamond multi-wire sawing machines are essential in semiconductor manufacturing, especially for slicing hard and brittle third-generation materials such as silicon carbide (SiC) and gallium nitride (GaN). The increased difficulty in processing these materials has highlighted the urgent need for reliable machine health monitoring and anomaly detection systems. While Predictive Maintenance and Prognostics and Health Management (PHM) frameworks have been widely applied across various industries, little research has specifically addressed semiconductor cutting equipment, where operational dynamics and data confidentiality present unique challenges. This study, in collaboration with an industry partner, develops two anomaly detection models tailored for diamond multi-wire sawing machines.
